Design and Manufacturing of High Temperature and Ultra High Pressure Reactor for Growing Gallium Nitride Single Crystal

CHEN Xuedong; ZHOU Yu; YAO Zuoquan; WANG Bing; FAN Haijun; NIU Zheng; WANG Yuxuan; CHENG Jingwei; XU Shuangqing; MENG Gang; QIAO Kun

doi:10.27022/j.issn2097-7697.2026.01.001

Journal of Special Equipment ›› 2026, Vol. 1 ›› Issue (1) : 3-8. DOI: 10.27022/j.issn2097-7697.2026.01.001

Advanced Manufacturing

Design and Manufacturing of High Temperature and Ultra High Pressure Reactor for Growing Gallium Nitride Single Crystal

CHEN Xuedong¹, ZHOU Yu¹, YAO Zuoquan¹, WANG Bing¹, FAN Haijun¹, NIU Zheng¹, WANG Yuxuan¹, CHENG Jingwei¹, XU Shuangqing^1,2, MENG Gang², QIAO Kun³

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Abstract

The acidic ammonothermal method is a key technological route for the large-scale production of large-size, high-quality gallium nitride single crystals. The extreme service conditions impose exceptionally stringent demands on the design and manufacturing of the high-temperature and ultra-high pressure reactors used for growing gallium nitride crystals. In this paper, the design requirements for the high-temperature and ultra-high pressure reactors are introduced firstly, and the potential failure modes are identified. Then, the key design and manufacturing technologies are elaborated, including strength design of high-temperature and ultra-high pressure reactors, high-temperature and ultra-high pressure sealing, development of special-shaped cylinder forging made of high-strength and high-toughness nickel based superalloys, diffusion bonding by hot isostatic pressing, as well as the inspection and the in-service performance of the reactors. Finally, relevant research recommendations are proposed for the development of larger diameter reactors.

Key words

Gallium nitride single crystal / High-temperature ultra-high pressure reactor / Superalloys / Design / Manufacturing

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CHEN Xuedong, ZHOU Yu, YAO Zuoquan, WANG Bing, FAN Haijun, NIU Zheng, WANG Yuxuan, CHENG Jingwei, XU Shuangqing, MENG Gang, QIAO Kun. Design and Manufacturing of High Temperature and Ultra High Pressure Reactor for Growing Gallium Nitride Single Crystal[J]. Journal of Special Equipment, 2026, 1(1): 3-8. https://doi.org/10.27022/j.issn2097-7697.2026.01.001

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