酸性氨热法是实现大尺寸、高品质氮化镓单晶规模化生产的重要技术路径,其苛刻服役工况对氮化镓单晶制备用高温超高压反应釜设计和制造提出了极高要求。本文首先介绍了高温超高压反应釜的设计需求,明确了反应釜的潜在失效模式,阐述了高温超高压容器强度设计、高温超高压密封、高强韧镍基高温合金异型筒体锻件研制、基于热等静压的扩散连接等设计制造关键技术以及反应釜检验检测与使用情况,最后针对更大直径反应釜研制提出了相关研究建议。
Abstract
The acidic ammonothermal method is a key technological route for the large-scale production of large-size, high-quality gallium nitride single crystals. The extreme service conditions impose exceptionally stringent demands on the design and manufacturing of the high-temperature and ultra-high pressure reactors used for growing gallium nitride crystals. In this paper, the design requirements for the high-temperature and ultra-high pressure reactors are introduced firstly, and the potential failure modes are identified. Then, the key design and manufacturing technologies are elaborated, including strength design of high-temperature and ultra-high pressure reactors, high-temperature and ultra-high pressure sealing, development of special-shaped cylinder forging made of high-strength and high-toughness nickel based superalloys, diffusion bonding by hot isostatic pressing, as well as the inspection and the in-service performance of the reactors. Finally, relevant research recommendations are proposed for the development of larger diameter reactors.
关键词
氮化镓单晶 /
高温超高压反应釜 /
高温合金 /
设计 /
制造
Key words
Gallium nitride single crystal /
High-temperature ultra-high pressure reactor /
Superalloys /
Design /
Manufacturing
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基金
工信部高质量发展专项(2025ZY02008); 安徽省重点研究与开发计划(202004a05020005); 安徽省制造业揭榜挂帅招才引智专项(JB24026); 国机集团科研专项(ZDZX2024-69)资助项目
